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Piezo datasheets

Piezo LEGS® Datasheets

Piezo LEGS® Linear Motors - Datasheets

SeriesMotorVersionsPDFMaximum Speed
Stall Force
Step Resolution
Piezo LEGS® Linear 6N LL10 11A, 11D    15 6.5 <1
Piezo LEGS® Linear Caliper 20N LC20 20A    10 20 <1
Piezo LEGS® Linear Twin 20N LT20 10A, 20A, 10B, 20B, 10D, 20D    10 20 <1
Piezo LEGS® Linear Twin 40N  LT40 10A, 20A, 10B, 20B    16 40 <1
Piezo LEGS® Linear Twin-C 300N LTC300 11    0.3 300 <1
Piezo LEGS® Linear Twin-C 450N LTC450 11   0.3 450 <1
Piezo LEGS® Linear Twin-C 40N LTC40 12, 13, 14, 16    10 40 <1
Piezo LEGS® Linear Twin-C 20N LTC20 13, 14    10 20 <1
Piezo LEGS® Linear Spring 15N LS15 10B    16 15  <1
A= Stainless Steel; B= Stainless Steel Vacuum; D= Non-Magnetic Vacuum

Piezo LEGS® Rotary Motors - Datasheets

SeriesMotorVersionsPDFMaximum Speed
Stall Torque
Piezo LEGS® Rotary 30 mNm LR17 030A20   170 30 <0.1
Piezo LEGS® Rotary 50 mNm LR50 12D   100 50 <0.1
Piezo LEGS® Rotary 80 mNm LR80 12A, 12B   100 80 <0.1
Piezo LEGS® WavePlate LW20 11A   100 20 <0.1
Piezo LEGS® Gonio Caliper 20N LC20 10A   7 1740 <0.01
A= Stainless Steel; B= Stainless Steel Vacuum; D= Non-Magnetic Vacuum

Piezo LEGS® Drivers

Series PDF Supply Voltage (V) Functionality Type Interface
PMD101   12 ... 24 Driver and Controller Microstepping Serial USB
PMCM31   12 Analog Driver Phase Shift ±10V
PMCM21   12 Push Button Driver Phase Shift  -

Piezo Motor Motion System 2.0.1

PiezoMotor Motion System is a free Windows software for getting started running Piezo LEGS® motors with micro-stepping driver PMD101 and/or PMD206. When installed, it gives direct access to all devices connected to your computer. The software allows open and closed-loop running, setting hardware parameters, plotting motion patterns, and programming motion sequences.

Download Now: Motion System 2.0.1

Walking Drive

Piezo Motor walking drive

The Piezo LEGS® motor uses piezo ceramic “legs” to create motion. Each component consists of multiple bimorph actuators that are co-sintered into a single body. These movable legs, made out of ceramic “muscles”, will generate powerful linear or rotary motion and remove need the for gears or mechanical transmission. Direct drive through friction coupling ensures there is no mechanical play or backlash, and the fact that there is no slippage means the motor will hold position even when powered down (not consuming any power). Unique for the walking principle is the ability to divide the full step into much smaller increments. As an example,  the linear Piezo LEGS® will be able to position on a sub-micron, or even single nanometer level. Given that kind of resolution, it is obvious that Piezo LEGS® is the product to use for any high precision application.

Reliable Positioning & Amazing Speed Range

Accurate positioning means little without reliability. As one set of legs remains engaged all the time, control of the position exists at all times. In a closed loop system, the positioning will be repeatable and precise.  The motor compensates the slightest error to stay on target. Piezo ceramic actuators are extremely quick to respond and will do so without any peak currents. The motion dynamics of the Piezo LEGS® are impressive.  For a rotary motor, you have microstep resolution of less than one micro-radian and can move with constant speeds that translate to less than one revolution per week ( or any speed up to a maximum of ~30 rpm).

Piezo Motor Customization

Made to Your Specification

The combination of power, speed dynamics, precision, and the compact format makes Piezo LEGS® a great choice. Piezo LEGS® comes in different standard versions, including models for linear or rotary motion and vacuum compatibility as well as options for non-magnetic applications. However, flexibility in the design allows modifications to adapt the motor’s properties and performance to suit your application or product. This saves you time and money as you do not have to change your product to fit the motor. MICROMO works closely together with PiezoMotor – the Swedish based manufacturer of piezoelectric motors. Please contact our piezo motor experts regarding your specific application needs.

Simple Control Electronics

The drive electronics required to drive and control the Piezo LEGS® rotational motor are no more complicated than those required for stepper motors. Applying voltage to the ceramic “muscles” synchronizes movement of each pair of legs, enabling them to rotate the output shaft clockwise and counter clockwise.

The unique design of Piezo LEGS® rotational motor makes the motor walk in a circle. By bending a pair of legs, the motor can move with microradian precision or one ten millionth of a turn! By taking several thousand steps per second, Piezo LEGS® rotational motor can reach a no-load speed of 20rpm.

By controlling the movement pattern of the legs more precisely, one can also adapt and optimize the motor’s properties to different types of applications.