While a conventional electric motor usually requires several assembled parts such as rotor, stator, ball bearings etc. to make it work, Piezo LEGS® multiple bimorph actuators are co-sintered to a single body with four movable legs made out of ceramic “muscles”. The ability to synchronize the movement of each pair of legs – just like an ant – is truly unique.
The motor operates by direct drive, so there’s no need for gears or mechanical transmissions and the material is virtually impossible to wear out. The Piezo LEGS® motors are manufactured in varying sizes ranging from a push / pull force of 1 Newton to several hundred newtons. You can choose from a variety of direct linear or rotational versions. Special motors are also available for non- magnetic applications as well as high vacuum and ultra high vacuum.
Performance
Typical value
Maximum speed (mm/s)
15
Holding force (N)
12
Stall force (N)
10
Step resolution (nm)
1
Stroke length (mm)
<100
Max step length (µm)
3
Piezo LEGS®Rotating
Piezo LEGS®R
Easily adapted to different specifications and demands - Very high stiffness and stable performance make the motor ideal for demanding positioning applications where nanometer precision is required - High force to size ratio - Easily integrated without the need to tune surrounding mechanical structures - Easy to manufacture in large quantities contributing to low cost